Vi-4202R	Vi-4304C
Camera	4M Monochrome	4M Color
Wafer Size	~200mm	~300mm
Handling	Robot
Loader	Open Cassette	Open Cassette, FOUP, FOSB
Defect Size(μm)	1.2/ 2.4 / 5.0 (objective lens 10x / 5x / 2.5x)
Size	1600mm(W) x 1300mm(D) x 1800mm(H)	2280mm(W) x 1140mm(D) x 2060mm(H)
Weight	1200kg	1700kg
Application	CMOS image sensor, POWER device, RF filter, BUMP, MEMS

1. Example of defects

2. Fine detection by area(layer) classification

• The area classification realizes multiple inspection sensitivity and tolerance depending on features of device pattern.
• Each area can have inspection parameters.

3. Refined image by various lighting and color image

• Defects that cannot be detected by grayscale inspection can be detected by color inspection.
• Combination of various light makes invisible defects see.