金属晶舟   Metal WAFER CASSETTE

      主要用途
      晶圓高溫烘烤、Probe机台使用 

 
      应用范围 
     应用于半导体、微机电、光电等
     1. 环境测试、烘烤ink、PI (Polymide )、BCB
     2. Probe机台        

 285-Series Aluminum Metal Cassettes:
Made from aluminum and stainless steel to provide dimensional stability over time and temperature changes.
Designed to be compatible with other SEMI standard plastic cassettes and process automation.

Various surface treatments are available:
1. Hard Clear (suffix-HC) anodized, which provides a hard, inert, ceramic-like coating that offers good abrasion resistance.
2. Hard Black (suffix-B) anodized.
3. Electroless-nickel (suffix-EN) plating, the only conductive plating available.

Models:
for 2" wafers: 285-2HC
for 3" wafers: 285-3HC, 285-3B, 285-3EN
for 4" wafers: 285-4HC, 285-4B, 285-4EN
for 5" wafers: 285-5HC, 285-5B, 285-5EN
for 6" wafers: 285-6HC, 285-6B, 285-6EN
for 8" wafers: 285-8HC, 285-8B, 285-8EN

Other models, including High Vacuum, Bake Out Cassettes or 300mm are also standard available.

    12寸金属晶圆片架

     2-12寸金属晶圆片架

   MCI ALUMINUM METAL WAFER CASSETTES

   SSC STAINLESS STEEL METAL WAFER CASSETTES

    SSC STAINLESS STEEL METAL THIN WAFER CASSETTES