自动晶圆寻平边机     自动晶圆寻缺角机  WAFER FLAT&NOTCH FINDER

 应用范围：半导体晶片、砷化鎵晶片、红蓝宝石石晶片

自动晶圆寻平边器

主要用途
对晶圆Flat/Notch平边(125mm-300mm)
应用范围
1. 进货/出货
2. 制程前后须对平边处
3. 可辅助设备对平边以增加机台产出
4. 芯片边缘检查
产品特色
1. 电子式控制系统以增加平边精确度
2. 有五组固定角度可做依需求做选择,且可自
    行设定任意一角度
3. LCD屏幕方便操作
4. 可设定连续旋转功能以目检晶圆边缘缺陷
5. ESD 静电防护功能
6. 可依需求调整速度
7. 适用于符合SEMI-Standard Cassette
8. 自动模式节省OP操作时间

Flat（Notch) Finder Automatic, ESD-safe

Specification:

Automatic EZ Guide Flat Aligner
(US Patent # 5,551,829)
Unique wafer roller and alignment system gently captures and positions notches for clean and accurate operation.
Open design allows increased laminar air flow and improves cleanliness while minimizing footprint.
User-friendly single button operation and fast, safe cycle time.
ESD safe material construction.
Proprietary static-dissipative polyurethane roller withstands more than 2 million cycles with accuracy of better than +/- one degree.
Class 1 cleanroom compatible.

Model numbers:
for 4" wafers: AFEZ-4E
for 5" wafers: AFEZ-5E
for 6" wafers: AFEZ-6E
for 8" wafers: AFEZ-8E

Note: Please specify cassette model numbers when ordering.

  手动晶圆寻平边机  手动晶圆寻缺角机

手动晶圆平边对准器

主要用途
芯片Notch/Flat对平边之辅助工具
应用范围
应用于半导体、微机电、光电等
1.进货或出货前对齐平边
2.使用自动机台前对平边，节省时间增加自动
   机台经济效率，使产能扩充
3.检查芯片圆周，降低边缘缺角问题
4.Wafer制造、再生
5.Non SMIF IC制造
6. Wafer Sort (CP)
7.MEMS
8.GaAs
产品特色
1.小型机台设计，有效节省空间
2.适用于SEMI standard 晶舟
3.坚固耐用不易变形
4.操作简便，有效提高产能
5.针对客户需求采用人性化设计修改
6.长期高稳定性
7.智能型设计降低芯片particle污染
8.设计顺畅定位点装置
9.ESD protection

Flatfinder Manual, ESD-Safe, EZ-Guide

Specification:

Manual EZ Guide Notch and Flat Aligners US Patent # 5,551,829) Unique wafer roller and alignment system gently captures and positions notches for clean and accurate operation. Cost effective Class 10 manual EZ Guide design utilizes proprietary hand crank roller knob gear package. Open design allows increased laminar air flow and improves cleanliness while minimizing footprint. ESD safe material construction. Proprietary static-dissipative polyurethane roller withstands more than 2 million cycles. Note: please specify cassette model numbers when ordering.