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 半导体制造/WAFER FAB >> 晶圆检测设备 >> 全自动晶圆表面瑕疵检查设备

 

   Non-patterned 300mm Wafer surface Inspection system 

      无图形晶圆表面缺陷检测系统

  WM - 10 is a standard model of 300 mm wafer.
   It is a high sensitivity inspection system of 48 nm.

  

     WM - 7 series is the most reasonable high - performance model below 200 mm wafer size.
     WM - 7SG can inspect transparent wafers.

    

  WM-10  WM-7S/7SG
Sensitivity 48nm@Bare-Wafer 80nm@Bare-wafer:WM-7S
200nm@Glass-wafer:WM-7SG
Wafer Size ~300mm ~200mm
Optical Source Laser Diode(405nm)
Loader FOUP(1 or2)/Open Cassette Open Cassette
Size 1500mm×1300mm×1750mm 860mm×900mm×1650mm
Application Bare-wafer/Filmed-wafer

       

 

  • WM-10 have 2axis Incident angle for particle.

  • WM-series have 2 wide NA lens for High-sensitivity detected.

2. Spiral Scan With high-resolution XY-potsion

  • WM-series are spiral scan method with rotation speed control.
  • XY-Data send to EB review Equipment then it can be review with easy alignment.


 

 

 

 

 

 

 

 

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